Method and system for a vacuum evaporative deposition process

Details Method and system for a vacuum evaporative deposition process Method and system for a vacuum evaporative deposition process

1984-08-08

1986-12-09

Bueker, Richard

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

4272555, 118663, 118665, 118667, 118715, 118726, 118718, C23C 1304, C23C 1308

Patent

active

046279890

ABSTRACT:
A method and system for a vacuum-evaporative film-deposition process displays bar charts of the local evaporation power of each vapor source in the process and the film thickness deposited thereby in spatial coordination on a single display screen.

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Vock et al., "Control of Electron Beam Melting Furnace Covering Both the Power Sources and the Microprocessor Aided Beam Performance, " Proceedings of the Conference on Electron Beam Melting and Refining-State of the Art, 1983, R. Bakish, Nov. 6-8, 1983, pp. 95-133.

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