Non-subliming mid-UV dyes and ultra-thin organic arcs having dif

Details Non-subliming mid-UV dyes and ultra-thin organic arcs having dif Non-subliming mid-UV dyes and ultra-thin organic arcs having dif

1996-02-08

1999-04-06

Richter, Johann

Organic compounds -- part of the class 532-570 series

Organic compounds

Nitriles

558402, C07C25509

Patent

active

058920960

ABSTRACT:
Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.

REFERENCES:
patent: 4719166 (1988-01-01), Blevins et al.
patent: 5139918 (1992-08-01), Goel
patent: 5215876 (1993-06-01), Pruett et al.

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