Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1986-05-05
1989-02-28
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250223B, 356239, H01J 516, G01N 2116
Patent
active
048088137
ABSTRACT:
Contamination, either in the form of particulate matter (46), e.g., dust and non-wetting liquid, or surface discontinuities (48), such as a smooth film or cratering, is collected on an explosed glass plate (12). Illumination at an angle incident with respect to a surface (14) of the glass plate causes the particulate matter to scatter light. A further light source illuminates the inside volume of the glass, causing light to scatter from the surface discontinuities. Either source of light scattering is detected by an optically sensitive detector (18) positioned beneath the glass plate. A bandpass filter (24) between the glass plate and the detector rejects spurious radiation.
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patent: 3894806 (1975-07-01), Remy et al.
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patent: 4297032 (1981-10-01), Temple
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4652745 (1987-03-01), Zanardelli
IBM Tech. Discl. Bull.; "Advanced Defect Detection System"; vol. 27; No. 12; May 1985; pp. 6999-7001.
Allen Stephone B.
Hughes Aircraft Company
Karambelas A. W.
Nelms David C.
Sternfels Lewis B.
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