Method for manufacturing photodetector using a porous layer

Details Method for manufacturing photodetector using a porous layer Method for manufacturing photodetector using a porous layer

1994-08-12

1995-12-26

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437230, 437235, H01L 3118

Patent

active

054787572

ABSTRACT:
The present invention is related to a method for manufacturing a photodetector which comprises steps of: (a) preparing a substrate having a back surface; (b) applying a first metal layer on the back surface; (c) annealing the substrate coated with the first metal layer in an inert gas atmosphere; (d) applying an anti-corrosion layer on the first metal layer; (e) immersing the anti-corrosion layer-applied substrate in a solution; (f) eroding the anti-corrosion layer-applied substrate to obtain a porous layer thereon; and (g) applying a thin film layer of a second metal to an upper surface of the porous layer to obtain the photodetector. The present photodetector has a wider frequency band and a higher sensitivity than conventional ones and the present manufacturing method is simple and economical.

REFERENCES:
patent: 4522663 (1985-06-01), Ovshinsky et al.
patent: 5374581 (1994-12-01), Ichikawa et al.

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