Process for making integrated circuits having titanium nitride t

Details Process for making integrated circuits having titanium nitride t Process for making integrated circuits having titanium nitride t

1986-03-07

1989-02-14

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437200, 437192, 437 56, 437 48, 357 42, 148DIG20, 148DIG147, H01L 21283

Patent

active

048046361

ABSTRACT:
Disclosed is a process for making VLSI integrated circuits and a local interconnect system, wherein first poly, second poly and moat are all interconnected in any desired pattern by a TiN local interconnect. No masks are required beyond those which would be required for the two poly levels and local interconnect capability anyway.

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