Equipment using a micro-actuator

Details Equipment using a micro-actuator Equipment using a micro-actuator

1992-09-04

1996-02-20

Skudy, R.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 83, 310309, H02K 700

Patent

active

054931568

ABSTRACT:
A micro electro mechanical device has at least two layers of substrates. In a first layer, a micro-actuator is formed, and in a second layer facing to the first layer, a passive movable unit is formed. Rotation of the rotor unit of the micro-actuator is coupled to the movable unit on the second layer by suitable engaging means.

REFERENCES:
patent: 4997521 (1991-03-01), Howe et al.
patent: 5013954 (1991-05-01), Shibaike et al.
patent: 5252881 (1993-08-01), Muller et al.
patent: 5262695 (1993-11-01), Kuwano et al.
Fan, Long-Shen, et al., "IC-Processed Electrostatic Micromotors" IEEE, 1988, pp. 666-669.
Suzuki, Kenichiro, et al. "Single Crystal Silicon Micro-Actuators" IEEE, 1990, pp. 625-628.
Laterally Driven Polysilicon Resonant Microstructures; Tang et al.; Univ. of California, Berkeley, CA; (no month) 1989, pp. 53-59.
The Liga-Technique--a Novel Concept of Microstructures and the Combination with Si-Technologies by Injection Molding; Menz et al; (no month) 1991; pp. 69-73.

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