Radiant energy – Ionic separation or analysis
Patent
1984-12-21
1987-03-24
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
250292, 250305, H01J 4942, H01J 4948
Patent
active
046527532
ABSTRACT:
In a mass spectrometer comprising an ion gun for radiating an ion beam onto a surface of an object to make the surface emit secondary ions, a detector for the secondary ions, and a directing member for directing the secondary ions to the detector, a specific energy bandwidth is defined in an energy distribution of the secondary ions in consideration of a peak of the energy distribution. An analyzable energy range is expanded to at least twice the specific energy bandwidth by the use of an expanding member coupled to the directing member. The expanding member may be used to expand a transmissible bandwidth of an energy filter included in the directing member by raising a resolution and a center transmission energy. The expanding member may be used to raise a maximum analyzable energy of a quadrupole mass filter included in the mass filter. Specifically, the expanding member may be implemented by changing a length of each electrode member of the mass filter and/or a frequency of an a.c. voltage supplied to each electrode member.
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patent: 4097738 (1978-06-01), Feve et al.
Werner et al., Charging of Insulators by Ion Bombardment and its Minimization for Secondary Ion Mass Spectrometry (SIMS) Measurements, J. App. Phys. (1976).
Jones, An Apparatus for Determining the Secondary Electron Emission Properties of Nonconductors, J. Phys. E., vol. 3 (Dec. 1970).
Medley, Energetic Ion Mass Analysis Using a Radio-Frequency Quadrupole Filter, Rev. Sci. Lust, 49(6), (Jun. 1978).
Nakamura et al., Surface Observation of Insulating Materials with Low Microprobe Analyzer, Proc. 6th Intl. Vac. Cong. (1974).
Leys et al., Surface Analysis in a SEM with SIMS Imaging, Scan Elec. Micr. (Apr. 1976).
Anderson Bruce C.
Anelva Corporation
Guss Paul A.
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