Method and apparatus for characterizing the quality of electrica

Details Method and apparatus for characterizing the quality of electrica Method and apparatus for characterizing the quality of electrica

1990-04-23

1993-03-23

Harvey, Jack B.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324158D, 324719, G01R 2726

Patent

active

051968029

ABSTRACT:
A method and apparatus for characterizing the quality of an electrically thin semiconductor film and its interfaces with adjacent materials by employing a capacitor and a topside electrical contact on the same side of the electrically thin semiconductor film to thereby permit the taking of capacitance-voltage (C-V) measurements. A computer controlled C-V measuring system is operatively coupled to the contact and capacitor to modulate the potential on the capacitor. Variation of the voltage applied to the capacitor enables modulation of the potential applied to the film to thereby vary the conductivity of the film between the capacitor gate node and the topside contact.

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Applied Physics Lett., 20, Jan. 1972 A.C. Ipri.
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Solid State Electron. 19,997 Worley Dec. 1976.

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