Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1991-07-30
1993-03-23
Berman, Jack J.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, 2504922, 3133611, H01V 37147
Patent
active
051967065
ABSTRACT:
A pair of lenses for an ion beam deposition device permit the formation of an ion beam with good beam characteristics and the variation of ion energy over an extremely wide range and at high perveance. An ion extractor is provided with a shield with a shape closely corresponding to the extraction electrode aperture to avoid sputtering and the introduction of contaminants into the material deposition process at low beam energies at the extractor. A three electrode deceleration lens allows high current beams to be decelerated to an energy of 25 eV for deposition, under some conditions. The combination of lenses allows the ion energy in the beam to be changed at particular regions along the beam so that optimal energies for focussing, mass analysis and deposition can be obtained.
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"IBM Technical Disclosure Bulletin"; vol. 22, No. 8A, Jan., 1980.
Keller John H.
Robinson James W.
Berman Jack J.
International Business Machines - Corporation
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