Scanning microscope comprising force-sensing means and position-

Details Scanning microscope comprising force-sensing means and position- Scanning microscope comprising force-sensing means and position-

1991-11-04

1993-10-19

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, H01J 314, H01J 3700

Patent

active

052548546

ABSTRACT:
A scanning, imaging system is described. A probe having a fine tip is disposed adjacent the surface of a sample and scanned in a pattern lying in a plane substantially parallel to the surface. Means are provided for oscillating the probe tip, substantially within the scanning plane. Shear forces, acting upon the probe tip in a substantially lateral direction, cause changes in the oscillation of the probe tip. Such changes are detected by a position-sensitive photodetector.

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S-M '91 International Conference on Scanning Tunneling Microscopy Interlaken, Aug. 12-16, 1991, "A Stand-Alone Scanning Force and Friction Microscope," M. Hipp et al, p. 61.
S-M '91 International Conference on Scanning Tunneling Microscopy Interlaken, Aug. 12-16, 1991, "Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy (SPM)," R. A. Buser et al, p. 62.

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