Humidity sensor

Measuring and testing – Gas analysis – Moisture content or vapor pressure

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7333504, G01N 3318

Patent

active

054739330

ABSTRACT:
A humidity sensor with an excellent water-repelling property is presented by covalently bonding a monomolecular film containing fluoroalkyl groups to the surface of a humidity sensing element, used for the sensor, via siloxane bonding. A chemically adsorbed monomolecular film containing fluoroalkyl groups is formed on the surface of a humidity sensing element via siloxane bonding after dipping and holding the element in a surface active solution such as heptadecafluorotridecyl trichlorosilane, and removing the unreacted material.

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