Method for forming barrier metal structure

Details Method for forming barrier metal structure Method for forming barrier metal structure

1992-05-21

1993-10-19

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437192, 437203, 148DIG20, H01L 2144

Patent

active

052544982

ABSTRACT:
Described herein is a method for forming a barrier metal structure in a minute contact hole in such a way as to ensure good coverage by the metal.
The method of the invention comprises the steps of: opening a contact hole in an insulation film layer on a substrate in a diameter larger than an originally intended target value; forming a barrier metal layer over the entire surfaces of the insulation film layer; forming an oxidation film layer over the entire surfaces of the barrier metal layer until the diameter of the contact hole reaches the original target value; etching the oxidation film layer by anisotropic etching; and embedding a metal in the contact hole. Further, after forming a metal plug, the barrier metal layer may be selectively etched back in such a way as to leave a barrier metal layer only at the bottom of the contact hole.

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patent: 4983532 (1991-01-01), Mituni et al.
patent: 5057447 (1991-10-01), Paterson
patent: 5066612 (1991-11-01), Ohba et al.
patent: 5093710 (1992-03-01), Higuchi
patent: 5098860 (1992-03-01), Chakravorty et al.

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