Microdevice for sensing a force

Details Microdevice for sensing a force Microdevice for sensing a force

1990-12-12

1993-05-11

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73720, 73867625, 73867629, 73867636, G01L 708, G01L 900

Patent

active

052091198

ABSTRACT:
A microsensor or micromechanical device based upon the piezoelectric properties of thin film lead zirconate titanate (PZT) with a thickness of between 0.1 and 5 microns. The thin film PZT is sandwiched between first and second electrodes which are provided with electrical connection means for electrically connecting the electrodes to a voltage sensor or voltage source. The invention also relates to a method for making such microsensor or micromechanical device.

REFERENCES:
patent: 2478223 (1949-09-01), Argabrite

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