Semiconductor transducer or actuator utilizing corrugated suppor

Details Semiconductor transducer or actuator utilizing corrugated suppor Semiconductor transducer or actuator utilizing corrugated suppor

1991-08-30

1993-05-11

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 73727, 7386262, G01L 708, G01L 906, G01L 912

Patent

active

052091180

ABSTRACT:
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.

REFERENCES:
patent: 4376929 (1983-03-01), Myhre
patent: 4467656 (1984-08-01), Mallon et al.
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4812199 (1989-03-01), Sickafus
patent: 4905575 (1990-03-01), Knecht et al.

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