Method to compensate for non-uniform film growth during chemical

Details Method to compensate for non-uniform film growth during chemical Method to compensate for non-uniform film growth during chemical

1998-05-08

2000-03-28

Paschall, Mark

Electric heating

Metal heating

By arc

21912141, 219502, 392416, 118 501, 2504941, 2504922, H05B 102, H01L 2120

Patent

active

060434503

ABSTRACT:
An apparatus for heating, according to a predetermined heating profile, a surface carrying a film. The invention includes a source of radiant energy. The source of radiant energy has several peak wavelengths, with each peak wavelength having a unique absorption profile related to the thickness of the film. The source of radiant energy is positioned to direct radiant energy toward the surface. Means are included for holding the source of radiant energy in a manner such that the combination of peak wavelengths produce the desired predetermined heating profile.

REFERENCES:
patent: 3836751 (1974-09-01), Anderson
patent: 4543472 (1985-09-01), Arai et al.
patent: 4680451 (1987-07-01), Gat et al.
patent: 4842686 (1989-06-01), Davis et al.
patent: 5073698 (1991-12-01), Stultz
patent: 5108792 (1992-04-01), Anderson et al.
patent: 5138973 (1992-08-01), Davis et al.
patent: 5155337 (1992-10-01), Sorrell
patent: 5179677 (1993-01-01), Anderson et al.
patent: 5336641 (1994-08-01), Fair et al.
patent: 5393564 (1995-02-01), Westmoreland et al.
patent: 5399379 (1995-03-01), Sandhu
patent: 5444217 (1995-08-01), Moore et al.
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5493987 (1996-02-01), McDiarmid et al.
patent: 5504831 (1996-04-01), Sandhu et al.
patent: 5650630 (1997-07-01), Dierks et al.
patent: 5751896 (1998-05-01), Sandhu

Affiliated with

Also associated with

Rating

Method to compensate for non-uniform film growth during chemical does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method to compensate for non-uniform film growth during chemical, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method to compensate for non-uniform film growth during chemical will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1327515