Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent
1997-09-12
2000-03-28
Nguyen, Nam
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
438 96, 438 97, 134 11, 427534, 427569, 427574, 427579, 427588, H01L 3118, H01L 3120
Patent
active
060431059
ABSTRACT:
A method of manufacturing a semiconductor device having a non-single crystalline semiconductor layer including an intrinsic or substantially instrinsic silicon which contains hydrogen or halogen and is formed on a substrate in a reaction chamber which may have a substrate holder. Sodium is removed from the inside of the reaction chamber and/or the surface of the substrate holder to remove sodium therefrom so that the concentration of sodium in the semiconductor layer is preferably 5.times.10.sup.18 atoms/cm.sup.3 or less.
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Nguyen Nam
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
Ver Steeg Steven H.
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