Process and arrangement to irradiate solid state materials with

Details Process and arrangement to irradiate solid state materials with Process and arrangement to irradiate solid state materials with

1985-12-19

1988-05-10

Chatmon, Saxfield

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

2504922, 31511131, 31511191, H01J 724

Patent

active

047438061

ABSTRACT:
In the process for irradiation of solid materials with ions, primarily to change their surface structure, and composition respectively, the ion irradiation is carried out by means of repetitive impulses. The apparatus carrying out the process has a charging unit (26) consisting of current generators, a control unit (27) connected to the charging unit, the voltage limiter (28), the spark power supply (25) and to the implantation control unit (29). The implantation control unit (29) receives and evaluates incoming signals form target unit (211) and controls the control unit (27) via lead n. The current generators of the charging unit (26) make switching off from the electric means unnecessary and they start recharging the impulse exciter (22) and the source magnet energy bank (23) immediately after the impulse is given.

REFERENCES:
patent: 4457803 (1984-07-01), Takigawa
patent: 4503329 (1985-03-01), Yamaguchi et al.
patent: 4582997 (1986-04-01), Jacquot

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