Array of thin film actuated mirrors for use in an optical projec

Details Array of thin film actuated mirrors for use in an optical projec Array of thin film actuated mirrors for use in an optical projec

1998-09-10

1999-11-16

Spyrou, Cassandra

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359871, 359872, 359873, 359876, 359214, 359295, 359221, 359224, G02B 508

Patent

active

059844817

ABSTRACT:
An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N thin film actuating structures, and an array of M.times.N mirror layers for reflecting light beams, each of the mirror layers further including a first side, a second opposing side and a center portion located therebetween, wherein the first side and the second opposited side of each of the mirror layers are secured on top of the first and second actuating parts of each of the actuating structures, respectively, such that when the first and second actuating parts in each of the actuating structures deform in response to an electrical signal applied between the first and second electrodes, the center portion of the corresponding mirror layer tilts while remaining planar, thereby allowing all of the center portion to reflect the light beams, resulting in an increased optical efficiency.

REFERENCES:
patent: 1985424 (1934-12-01), Piggott
patent: 2016962 (1935-10-01), Flint et al.
patent: 2703798 (1955-03-01), Schwartz
patent: 2920529 (1960-01-01), Blythe
patent: 3544201 (1970-12-01), Fowler et al.
patent: 3614677 (1971-10-01), Wilfinger
patent: 3758199 (1973-09-01), Thaxter
patent: 4441791 (1984-04-01), Hornbeck
patent: 4518976 (1985-05-01), Tasumi
patent: 4979789 (1990-12-01), Um
patent: 5032906 (1991-07-01), Um
patent: 5035475 (1991-07-01), Lee
patent: 5085497 (1992-02-01), Um
patent: 5126836 (1992-06-01), Um
patent: 5138309 (1992-08-01), Gonzalez et al.
patent: 5150205 (1992-09-01), Um et al.
patent: 5159225 (1992-10-01), Um
patent: 5185660 (1993-02-01), Um
patent: 5209119 (1993-05-01), Polla
patent: 5218512 (1993-06-01), Nakamura
patent: 5245369 (1993-09-01), Um et al.
patent: 5247222 (1993-09-01), Engle
patent: 5260798 (1993-11-01), Um et al.
patent: 5281888 (1994-01-01), Takeuchi
patent: 5481396 (1996-01-01), Jl et al.

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