Brush assembly apparatus

Details Brush assembly apparatus Brush assembly apparatus

1996-08-29

1999-07-20

Chin, Randall E.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 15 883, 15102, A46B 1302, B08B 1100, B08B 1300

Patent

active

059241543

ABSTRACT:
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.

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