Light shield for a back-side thinned CCD

Details Light shield for a back-side thinned CCD Light shield for a back-side thinned CCD

1994-02-14

1995-06-13

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257229, 257294, 257508, 257908, H01L 2714, H01L 2978

Patent

active

054245745

ABSTRACT:
A light shield for a back-side thinned CCD has an aluminum reflective layer over the imaging surface of the CCD with a vanadium barrier layer between the aluminum reflective layer and the imaging surface. An optional oxide layer may be formed between the reflective and barrier layers.

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patent: 4774557 (1988-09-01), Kosonocky
patent: 4916543 (1990-04-01), Crosby
patent: 4941029 (1990-07-01), Bluzer
patent: 5084749 (1992-01-01), Losee et al.
patent: 5221854 (1993-06-01), Banerjee et al.

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