Substrate internal defect and external particle detecting appara

Details Substrate internal defect and external particle detecting appara Substrate internal defect and external particle detecting appara

1994-03-22

1995-06-13

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356369, G02F 101

Patent

active

054245362

ABSTRACT:
A defect estimating apparatus includes a laser radiating unit For obliquely radiating laser light on a surface to be observed of an object to be inspected, an observing unit for observing, through the surface to be observed, scattered light produced From internal defects or particles of the object by refracted light of the laser light, and observing scattered light or reflected light produced from flaws or particles on the surface by tile laser light, and a component separating unit for allowing the observing unit to perform observation by using both light containing primarily a p-polarized light component of the laser light and light containing primarily an s-polarized light component of the laser light.

REFERENCES:
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4893932 (1990-01-01), Knollenberg
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5177559 (1993-01-01), Batchelder et al.

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