Fishing – trapping – and vermin destroying
Patent
1993-07-30
1995-06-13
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437187, 437203, H01L 21205
Patent
active
054242460
ABSTRACT:
According to this invention, there is provided a method of forming a groove wiring layer, including the steps of forming a metal oxide film, consisting of a metal oxide having a decrease in standard free energy smaller than a decrease in standard free energy of a hydrogen oxide or of a carbon oxide, on an insulating film formed on a semiconductor substrate, and reducing the metal oxide film to form an electrode-wiring layer consisting of a metal which is a main component constituting the metal oxide. In this manner, an electrode-wiring layer having high EM and SM resistances without causing an increase in electric resistivity caused by an impurity or the like can be obtained.
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Hayasaka Nobuo
Matsuo Mie
Miyajima Hideshi
Okano Haruo
Suguro Kyoichi
Chaudhuri Olik
Horton Ken
Kabushiki Kaisha Toshiba
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