Method for manufacturing a non-volatile memory having a floating

Details Method for manufacturing a non-volatile memory having a floating Method for manufacturing a non-volatile memory having a floating

1991-12-13

1995-06-13

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 49, H01L 21265

Patent

active

054242320

ABSTRACT:
A non-volatile memory having a Floating Gate Oxide type field effect transistor provided with a floating gate on a semiconductor substrate through a tunnel oxide film, including an oxide blocking film formed on the side wall of the floating gate for preventing a tunnel insulating film from being thermally oxidized by thermal oxidation.

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