Continuous vapor deposition apparatus

Details Continuous vapor deposition apparatus Continuous vapor deposition apparatus

1993-09-30

1995-06-13

Bueker, Richard

Coating processes

Coating by vapor, gas, or smoke

Moving the base

4272556, 4272557, 118708, 118712, 118719, C23C 1602, C23C 1654

Patent

active

054240972

ABSTRACT:
Continuous vapor deposition apparatus for coating objects with a coating material, e.g., parylene, are disclosed. The apparatus comprise an entrance chamber for loading the objects, a process chamber for coating the objects, and an exit chamber for removing the objects. Coating material is introduced into the process chamber under vacuum conditions in a vaporized state. The pressure in the process chamber can be controlled by modulating the rate of introduction of the coating material with a modulating valve in response to the pressure in the process chamber. A process for continuously coating objects by vapor deposition under vacuum conditions, suitable for use in the apparatus, is also disclosed.

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