Displacement detection apparatus

Details Displacement detection apparatus Displacement detection apparatus

1993-12-20

1996-01-09

Lerner, Martin

Optical: systems and elements

Diffraction

From grating

250237G, 359571, G02B 518, G02B 2744, H01J 314, H01J 4014

Patent

active

054833779

ABSTRACT:
A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.

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Jull et al, "Perfectly Blazed Triangular Groove Reflection Gratings", J. Op. Soc. Am. A., vol. 1, No. 2, Feb. 1984, pp. 180-182.
Gross et al, "Blazed Dielectric Gratings With High Beam-Coupling Efficiencies," Applied Physics Letters, vol. 36, No. 7, 1 Apr. 1980, pp. 523-525.

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