Pyroelectric infrared detector and method of fabricating the sam

Details Pyroelectric infrared detector and method of fabricating the sam Pyroelectric infrared detector and method of fabricating the sam

1995-01-17

1996-01-09

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

G01J 502

Patent

active

054830672

ABSTRACT:
A pyroelectric infrared detector includes a substrate having a recess. A pyroelectric portion substantially aligns with the recess. A resin film is located between the substrate and the pyroelectric portion. The recess faces the resin film. First and second electrodes are connected to first and second surfaces of the pyroelectric portion respectively. The pyroelectric portion may include a pyroelectric film of Pb.sub.x La.sub.y Ti.sub.z Zr.sub.w O.sub.3 where atomic fractions "w", "x", "y", and "z" satisfy one of following conditions a), b), and c):

REFERENCES:
patent: 3773564 (1973-11-01), Yamaka et al.
patent: 4532424 (1985-07-01), Cheung
patent: 5293041 (1994-03-01), Kruse, Jr.
patent: 5354732 (1994-10-01), Tabata et al.
"Pyroelectric liner array infrared sensors made of c-axis-oriented La-modified PbTiO.sub.3 thin films" by Ryoichi Takayama et al., J. Appl. Phys. 63(12), 15 Jun. 1988, pp. 5868-5872.

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