Exposure mask for fabricating microlenses

Details Exposure mask for fabricating microlenses Exposure mask for fabricating microlenses

1993-09-01

1996-01-09

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430321, G03F 114

Patent

active

054828007

ABSTRACT:
A microlens of any designed configuration is formed as a replica in a photoresist material, and the photoresist material replica is used to reproduce the replica directly in a substrate material.

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G. Artzner "Aspherical surfaces engraved on photoresist coating: manufacture of a zonal corrector plate for an aberrating cassegrainian telescope", 1987, Optical Components and Systems SPIE, vol. 805.
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W. Goltsos & M. Holz "Agile Beam Steering Using Binary Optics Microlens Arrays", Nov. 1990, Optical Engineering, vol. 29, No. 11.

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