Test chamber for particle emitters

Details Test chamber for particle emitters Test chamber for particle emitters

1989-05-02

1990-11-06

Noland, Tom

Measuring and testing

Instrument mechanism or transmission

Rate of change

738655, 377 10, G01N 3300, G01N 1510

Patent

active

049676083

ABSTRACT:
A test chamber is disclosed that permits standardized measurement of particles in the chamber environment. A device or structure that is suspected of the emitting particles and which is desired to be tested is located within the chamber. The chamber environment is then controlled by the introduction of filtered air thereby permitting both static measurements of particle emissions from the device or structure and flow through measurements of particle emissions from the device or structure.

REFERENCES:
patent: 4154088 (1979-05-01), Werner
patent: 4154111 (1979-05-01), Anderson et al.
patent: 4477187 (1989-10-01), Pettit et al.
patent: 4625552 (1986-12-01), Johnson
patent: 4761074 (1988-08-01), Kolsaka et al.
Liu, BHY and Kinstley "Aerosol Charging . . . in Clean Rooms" J. of Environmental Sciences Mar./Apr. 87 pp. 42-46.
Blitshteyn and Shelton "Contamination . . . Emitters"Microcontamination, Aug. 1985 pp. 29-32.
Cooper, Miller, Wu; Deposition of Submicron Particles IBM Research Report RC 13722 5/26/88 pp. 1-26.
Donovan, Yamamoto et al. "Experimental Study . . . Gradients" 9th ICCCS Proceedings 1988, pp. 37-42.
Donovan et al. "Measuring Particle Emission . . . " Microcontamination Oct. 1987 pp. 36-39, 60-63.
Donovan et al. "Dependence of Particle . . . Potential" IES Proceedings 1987 pp. 473-478.
Donovan et al. "Polarity Dependence . . . Discharge" Microcontamination May 1986 pp. 38-49.
Fissan and Turner "Control of Particle Flux . . . Contamination" 9th ICCCS Proceedings 1988 p. 33-36.
Hinds "Aerosol Technology" John Wiley & Sons 1982, pp. 239, 302-305.
Rogers and Bailey "A Closed Chamber . . . Equipment" Microcontamination Feb. 1987, pp. 43-47, 66-67.
Inoue et al "Aersol Deposition on Wafer" 1988 Proceedings Inst of Environmental Sciences pp. 423-428.
Whitby et al "Dynamic Method . . . Purifiers" ASHRAE Trans. 89(2a) pp. 172-184 (No. 2771).
Suzuki and Izumoto "Effectiveness of . . . Clean Rooms" 1988 Proceedings Inst. of Environmental Sciences pp. 405-412.

Affiliated with

Also associated with

Rating

Test chamber for particle emitters does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Test chamber for particle emitters, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test chamber for particle emitters will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1300134