Multistage vacuum pump

Details Multistage vacuum pump Multistage vacuum pump

1993-09-07

1996-01-09

Bertsch, Richard A.

Pumps

Successive stages

Reciprocating rigid stages

417267, 417491, F04B 2502, F04B 300

Patent

active

054824435

ABSTRACT:
A multistage vacuum pump is achieved by utilizing a single piston and cylinder assembly having opposite end portions with substantially equal diameters and an enlarged diameter central portion. One end of the cylinder is closed by a valve and a first stage pumping chamber is defined between the valve and the piston. The enlarged diameter portion of the piston has an axial extent less than the axial extent of the enlarged diameter portion of the cylinder to define second and third stage pumping chambers on opposite sides of the enlarged diameter portion of the piston. The three pumping chambers are interconnected by passage means to an inlet and outlet to provide a sequential reduction in pressure. A single drive unit may be connected to a plurality of pumping units for reciprocating the piston in each pumping unit.

REFERENCES:
patent: 4560327 (1985-12-01), Bez et al.
patent: 4705460 (1987-11-01), Braun
patent: 4718832 (1988-01-01), Takahashi
patent: 4790726 (1988-12-01), Balkau et al.
patent: 4854825 (1989-08-01), Bez et al.
patent: 5042521 (1991-08-01), Shiomi

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