Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1991-11-27
1993-03-02
Gellner, Michael L.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 53, G03B 2752
Patent
active
051913747
ABSTRACT:
An exposure control apparatus for controlling exposure quantity of pulse energy to a resist, when pattern of a rectile is transcribed to the resist on a wafer, using pulse energy accompanied by energy variation within a predetermined range per each emission, i.e., coherent or non-coherent light energy, or pulse energy other than light, such as X-ray. The exposure control apparatus comprises arithmetic means for calculating the pulse number necessary for the exposure based on range of energy variation between emission pulse energies of each time and the allowable control accuracy predetermined for the aimed proper exposure quantity, and for estimating the object value corresponding to the object integrated energy quantity to be supplied to the resist every time each pulse energy of the necessary pulse number is illuminated based on the predetermined value in response to the pulse number and the proper exposure quantity; an energy quantity measuring apparatus for detecting the measured value corresponding to the actual integrated energy quantity obtained by the pulse energy previously illuminated; and an energy quantity adjusting apparatus for adjusting the energy quantity of next pulse energy corresponding to the difference between the object value to be attained in response to the illumination of next pulse energy and the measured value until then.
REFERENCES:
patent: 4970546 (1990-11-01), Suzuki et al.
Hazama Junji
Suzuki Kazuaki
Uemura Tsunesaburo
Gellner Michael L.
Meller Michael N.
Nikon Corporation
Rutledge D.
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