Method and apparatus for producing a variable intensity pattern

Details Method and apparatus for producing a variable intensity pattern Method and apparatus for producing a variable intensity pattern

1978-08-21

1981-12-01

Gantz, Delbert E.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, 427282, C23C 1500

Patent

active

043034896

ABSTRACT:
Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate by providing a mask having a patterned opening therein between the cathode of a sputtering device and the substrate to be coated, the mask being so positioned as (a) to not affect the plasma over the cathode surface and (b) to be out of contact with the substrate surface, there being relative movement between at least the cathode and the substrate. The substrate may be either flat, curved or tubular, for example, there also being described apparatus and a method of making a broad band, dipole antenna.

REFERENCES:
patent: 3170810 (1965-02-01), Kagan
patent: 3335030 (1967-08-01), Vercesi
patent: 3561993 (1971-02-01), Geffcken
patent: 3573960 (1971-04-01), Duncan
patent: 3664948 (1972-05-01), Graffeo, Jr. et al.
patent: 3775285 (1973-11-01), Lane
patent: 3904503 (1975-09-01), Hanfmann
patent: 3933644 (1976-01-01), Skinner et al.
patent: 4013502 (1977-03-01), Staples
patent: 4102768 (1978-07-01), Kearin et al.

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