Magnetic thin film

Details Magnetic thin film Magnetic thin film

1984-11-21

1986-10-21

Robinson, Ellis P.

Stock material or miscellaneous articles

Composite

Of inorganic material

360134, 360135, 360136, 427 39, 427128, 427130, 427132, 428900, G11B 564

Patent

active

046185429

ABSTRACT:
A magnetic thin film comprised of at least one, usually two magnetic metals selected from iron, nickel, and cobalt is vapor phase grown on a substrate, for example, polyimide film by introducing chemical compounds of the metals in vapor form, a reducing gas, and optionally, an oxidizing gas, into a vacuum chamber where the substrate is placed and preferably heated to a temperature of at least 100.degree. C., and subjecting the reaction gases to plasma excitation, thereby achieving the vapor phase growth of the magnetic thin film on the substrate.

REFERENCES:
patent: 3206325 (1965-09-01), Auerbach
patent: 4419381 (1983-12-01), Yamazaki

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