Optical spectroscope for scanning electron microscope

Details Optical spectroscope for scanning electron microscope Optical spectroscope for scanning electron microscope

1981-06-11

1983-10-18

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

356334, 250310, G01J 318, G01N 2162

Patent

active

044102720

ABSTRACT:
Optical spectroscope for scanning electron microscopes, the latter comprising a vacuum chamber containing a sample holder bombarded by an electron beam.
The microscope chamber contains a concave mirror having an opening, a plane deviating mirror and an exit window for the chamber. Outside the microscope chamber is provided a drum carrying a plurality of flat diffractive gratings, the drum being equipped with a bracket which rotates about an axis controlled by a stepping motor. In addition there are a spherical concave mirror, a slit blocking means and a photodetector.

REFERENCES:
patent: 3659945 (1972-05-01), Roche et al.
patent: 3775620 (1973-11-01), Meier
Knisely et al., Analytical Chemistry, vol. 41, No. 1, Jan. 1969, pp. 50-53.
Carlsson et al., Journal of Physics E., vol. 7, No. 2 Jan. 1974, pp. 98-100.
Balk et al., Conference: Scanning Electron Microscopy/1975 (Part I), Proceedings of the Eighth Annual Scanning Electron Microscope Symposium, IIT Research Institute, Chicago, Illinois, Apr. 7-11,1975, pp. 447-455.
Steyn et al., Journal of Microscopy, vol. 107, Pt. 2, Jul 1976, pp. 107-128.

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