Process for forming organic film

Details Process for forming organic film Process for forming organic film

1986-05-29

1988-02-09

Thurlow, Jeffery

Plastic and nonmetallic article shaping or treating: processes

Carbonizing to form article

Agglomeration or accretion

20419211, 20419221, 264 81, 264 83, 4251748E, 427 34, 427 38, 427 41, 427 42, B29C 4150

Patent

active

047241063

ABSTRACT:
A process for preparing an organic film comprising the steps of ejecting an organic material in a gaseous state from an injection nozzle into a vacuum region to form clusters due to adiabatic expansion, subjecting the clusters to an intermediate state necessary for forming polymers due to abstraction and the like occurring in a part of atoms forming the clusters, and effecting polymerization reaction of the clusters on a substrate, thereby to form a dense organic film of a high quality and a high bonding strength.

REFERENCES:
patent: 3406040 (1968-10-01), DaSilva et al.
patent: 3961103 (1976-06-01), Aisenberg
patent: 4161418 (1979-07-01), Morimoto et al.
patent: 4227961 (1980-10-01), Takagi
patent: 4242188 (1980-12-01), Niinomi et al.
patent: 4281029 (1981-07-01), Takagi et al.
patent: 4354909 (1982-10-01), Takagi et al.
patent: 4394402 (1983-07-01), Yasuta et al.
"Organic Film Formation by Cluster Beam Deposition", Usui et al, Isiat Proceedings, 1982, pp. 331-336.

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