Process for production of zinc oxide thin film, and process for

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

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136256, 438 98, 438608, 438609, 438678, 427204, 427205, 205124, 205155, 205316, 205333, H01L 3100, H01L 2100, B05D 136, C25D 908

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058044663

ABSTRACT:
A process for stably producing a zinc oxide thin film by electrolysis with excellent adhesion to a substrate is described. In particular, a zinc oxide thin film suitably used as a light confining layer of a photoelectric conversion element is formed on a conductive substrate by applying a current between a conductive substrate immersed in an aqueous solution containing at least nitrate ions, zinc ions, and a carbohydrate, and an electrode immersed in the solution.

REFERENCES:
Pascu, et al., Salts for chemical zinc coating of aluminum and its alloys, Rev. Chim. (Bucharest), vol. 38 No. 8, pp. 689-692, 1987.
P-IA-15a-SiC/A-Si/ASiGe Multi-Bandgap Stacked Solar Cells With Bandgap Profiling, Sannomiya et al., Technical Digest of the International PVSEC-5, Kyoto, Japan, p. 387, 1990.
Electrolyte Optimization for Cathodic Growth of Zinc Oxide Films, M. Izaki et al., Electrochem. Soc., vol. 143, Mar. 1996, L53.

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