Polyfunctional compounds containing .alpha.-diazo-.beta.-keto es

Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate

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Details

534557, 534565, 534561, 534560, C07C24518, C07C24514, C07F 502, C07F 718

Patent

active

051910691

ABSTRACT:
Polyfunctional compounds containing .alpha.-diazo-.beta.-keto ester units and sulfonate units are disclosed. The polyfunctional compounds have high sensitivity in the deep UV and high thermal stability. Processes for producing the compounds are disclosed. A preferred process first synthesizes .beta.-ketoester/sulfonate precursors and then uses diazo transfer to convert the precursors into the novel compounds. Radiation-sensitive mixtures containing the compounds are also disclosed.

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