Method for producing thin film solar battery

Details Method for producing thin film solar battery Method for producing thin film solar battery

1996-02-28

1998-04-07

Weisstuch, Aaron

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

136258, 257458, 118718, 118719, 118724, 118725, H01L 3120

Patent

active

057364311

ABSTRACT:
In producing a thin film solar battery using a semiconductor film producing apparatus, a semiconductor film is formed on a substrate by glow discharge decomposition. The substrate is transported in a desired direction within a glow discharge space. A substrate heating unit heats the substrate at different temperatures along the desired direction in which the substrate is transported. Consequently, a plurality of semiconductor layers having different hydrogen concentrations are laminated at desired thicknesses with desired characteristics. A glow discharge generating unit generates high frequency power having different frequencies and/or different power outputs along the desired direction in which the substrate is transported.

REFERENCES:
patent: 5571749 (1996-11-01), Matsuda et al.

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