VCSEL with vertical offset operating region providing a lateral

Details VCSEL with vertical offset operating region providing a lateral VCSEL with vertical offset operating region providing a lateral

1993-03-08

1994-09-27

Bovernick, Rodney B.

Coherent light generators

Particular active media

Semiconductor

372 45, 372 48, 372 96, H01S 305, H01S 319

Patent

active

053512570

ABSTRACT:
A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed.

REFERENCES:
patent: 4608695 (1986-08-01), Oda et al.
patent: 4675876 (1987-06-01), Svilans
patent: 4819243 (1989-04-01), Opschoor
patent: 4873696 (1989-10-01), Coldren et al.
patent: 4943970 (1990-07-01), Bradley
patent: 5212701 (1993-05-01), Choquette et al.
patent: 5245622 (1993-09-01), Jewell et al.

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