Position detecting system

Details Position detecting system Position detecting system

1985-05-24

1987-10-27

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356400, G01B 1100

Patent

active

047026065

ABSTRACT:
An alignment system includes an element bearing a plurality of patterns on the surface thereof, the plurality of patterns being arranged in a predetermined direction, a stage for holding the element, scanning means for scanning the plurality of patterns of the element held by the stage in the predetermined direction and making position signals indicative of the positions of the plurality of patterns in the predetermined direction on the element, and operation means for operating and putting out a signal indicative of a position which is in a predetermined relation with the positions of the plurality of patterns in the predetermined direction, on the basis of the position signals.

REFERENCES:
patent: 3811779 (1974-05-01), Jacobs et al.
patent: 4265542 (1981-05-01), Snow
patent: 4423959 (1984-01-01), Nakazawa et al.
patent: 4531060 (1985-07-01), Suwa et al.
patent: 4550374 (1985-10-01), Meshman et al.
patent: 4553845 (1985-11-01), Kuroki et al.
patent: 4566795 (1986-01-01), Matsuura et al.

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