Exposure apparatus having dynamically isolated support structure

Details Exposure apparatus having dynamically isolated support structure Exposure apparatus having dynamically isolated support structure

1999-05-27

2000-11-21

Adams, Russell

Photocopying

Projection printing and copying cameras

Detailed holder for original

355 53, 355 72, 318640, G03B 2762, G03B 2758, G03B 2742, G05B 106

Patent

active

061511056

ABSTRACT:
An exposure apparatus includes an exposure device disposed between a mask and an object. The exposure device exposes a pattern of the mask onto the object. The apparatus also includes a mask stage associated with the exposure device to hold the mask, and a drive to move the mask stage. At least part of the drive is connected to a first support structure so that a reaction force exerted by movement of the mask stage by the drive is transferred to the first support structure. A second support structure is provided, which is dynamically isolated from the first support structure. A position detector is supported by the second support structure, and detects a position of the mask stage.

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