Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

1979-10-03

1982-02-09

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 3700

Patent

active

043151523

ABSTRACT:
In an electron-beam probe instrument such as a scanning electron microscope in which the electron gun employs a field-emission cathode the condenser lens is of the `snorkel` design. The term `snorkel` is used to denote a single-pole magnetic lens in which the pole-piece has an axially extending nose portion. The lens is positioned so that the cathode region is immersed in the radial field at the nose of the lens. Preferably the lens is placed closely behind the cathode but outside the vacuum envelope.

REFERENCES:
patent: 3707628 (1972-12-01), Bassett et al.
patent: 3812365 (1974-05-01), LePoole
patent: 3870891 (1975-03-01), Mulvey
patent: 3924126 (1975-12-01), Anderson et al.

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