Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Patent
1993-03-08
1994-09-27
Cuchlinski, Jr., William A.
Thermal measuring and testing
Temperature measurement
Nonelectrical, nonmagnetic, or nonmechanical temperature...
374129, 356 43, G01J 554
Patent
active
053502361
ABSTRACT:
A method is disclosed for continuously measuring the temperature of a semiconductor substrate in a chamber is disclosed. The first step of the method involves providing a substantially clean semiconductor substrate having a layer a reflective surface thereon into a chamber. A film is formed superjacent the surface by introducing a gas comprising at least one of N.sub.2, NH.sub.3, O.sub.2, N.sub.2 O, Ar, Ar--H.sub.2, H.sub.2, GeH.sub.4, or any fluorine based gas and photon energy in situ. The photon energy, having a wavelength substantially in the absorption band of silicon, generates a temperature substantially within the range of 500.degree. C. to 1250.degree. C. Subsequently, the reflectivity of the surface is measured prior to introducing the gas, and continuously, while forming the film until the film is substantially formed. The substrate is exposed to photon energy having a power level responsive to the measured reflectivities of the film.
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Martin Annette L.
Sandhu Gurtej S.
Thakur Randhir P. S.
Bennett G. Bradley
Cuchlinski Jr. William A.
Micron Semiconductor Inc.
Pappas Lia M.
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