Distance detector for focus control in laser beam machine

Details Distance detector for focus control in laser beam machine Distance detector for focus control in laser beam machine

1998-12-23

2000-11-21

Metjahic, Safet

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

G01R 2726

Patent

active

061508268

ABSTRACT:
A distance detector detects a distance between a focal position and a workpiece by use of a capacitance. A sensing electrode forms the capacitance relative to said workpiece. An input signal generator generates an alternating signal or an input signal that is input into the sensing electrode. A signal detector detects an alternating signal or a detection signal that is generated at the sensing electrode and that has a value varied in accordance with the capacitance. A computing unit receives the input signal from the input signal generator and the detection signal from the signal detector. The computing unit extracts a component having the same frequency as a frequency of the input signal from the detection signal. Thus, it computes the extracted component to generate a distance information output representing the distance between the focal position and the workpiece.

REFERENCES:
patent: 4772844 (1988-09-01), Andeen et al.
patent: 5070302 (1991-12-01), Marcus et al.
patent: 5101165 (1992-03-01), Rickards
patent: 5340962 (1994-08-01), Schmidt et al.
patent: 5428280 (1995-06-01), Schmidt et al.
patent: 6031380 (2000-02-01), Gleixner et al.

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