Silane compound

Details Silane compound Silane compound

1998-07-30

2000-11-21

Shaver, Paul F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

556487, C07F 708

Patent

active

061505498

ABSTRACT:
A novel silane compound is disclosed, which is used as a suitable strating material (monomer) of polysilane eligible for the precursor of electroconductive- and photoconductive-materials such as phtoresists as well as polymerization initiators and silicone carbide-based ceramics and which is useful for chemical vapor deposition.

REFERENCES:
patent: 3567754 (1971-03-01), Alsgaard
patent: 4297499 (1981-10-01), Koga et al.
patent: 4309558 (1982-01-01), Koga et al.
patent: 5646326 (1997-07-01), Schuler
patent: 5856543 (1999-01-01), Friedrich et al.
patent: 5874603 (1999-02-01), Arkles
Akira Watanabe and Minoru Matsuda, "Electrical and Optical Properties of Heat-treated Silicon Network Polymers", Chemistry Letters, pp. 1101-1104, Jul. 1991.

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