Method for manufacturing metal oxide capacitor and method for ma

Details Method for manufacturing metal oxide capacitor and method for ma Method for manufacturing metal oxide capacitor and method for ma

1997-12-18

2000-11-21

Tsai, Jey

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

438240, H01G 706

Patent

active

061501832

ABSTRACT:
A metal oxide capacitor is manufactured by sequentially laminating a metal oxide film and a secon electrode on a first electrode. The metal oxide film is formed and then heat-treated in an atmosphere with an oxygen pressure higher than 1 atm.

REFERENCES:
patent: 5443030 (1995-08-01), Ishihara et al.

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