Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1997-09-05
2000-11-21
Speer, Timothy M.
Stock material or miscellaneous articles
Composite
Of quartz or glass
428427, 428446, 257635, 257650, B32B 900, B32B 1706
Patent
active
061500291
ABSTRACT:
A method of forming a film having enhanced reflow characteristics at low thermal budget is disclosed, in which a surface layer of material is formed above a base layer of material, the surface layer having a lower melting point than the base layer. In this way, a composite film having two layers is created. After reflow, the surface layer can be removed using conventional methods.
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patent: 5783493 (1998-07-01), Yeh et al.
patent: 5789317 (1998-08-01), Batra et al.
patent: 5885896 (1999-03-01), Thakur et al.
Sandhu Gurtej
Thakur Randhir P. S.
Micro)n Technology, Inc.
Speer Timothy M.
Young Bryant
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