Probe apparatus and method of alignment for the same

Details Probe apparatus and method of alignment for the same Probe apparatus and method of alignment for the same

1992-07-31

1994-06-14

Wieder, Ken

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324158P, 324690, G01R 1067

Patent

active

053213521

ABSTRACT:
A probe apparatus for measuring electrical characteristics of chips arranged on a wafer comprises a probe card having probe needles and a rotary chuck for supporting the wafer. The chuck is supported on an XY stage. A stationary alignment bridge is provided with a stationary camera and a capacitance sensor. The stage is provided with a movable camera. A transparent plate on which a target is formed is attached to the chuck. The target and its peripheral portion are formed of transparent thin films. The target is used for positioning and focusing of the cameras. The thin films are used for height detection by use of the capacitance sensor.

REFERENCES:
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4565966 (1986-01-01), Burr et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4929893 (1990-05-01), Sato et al.
patent: 5023557 (1991-06-01), Moran et al.
patent: 5065103 (1991-11-01), Slinkman et al.

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