Automatic defect classification individual defect predicate valu

Details Automatic defect classification individual defect predicate valu Automatic defect classification individual defect predicate valu

1997-07-18

1999-01-19

Ruggiero, Joseph

Boots, shoes, and leggings

382145, 36446817, 364490, G06F 1900

Patent

active

058620559

ABSTRACT:
A method of determining classification codes for defects occurring in semiconductor manufacturing processes and for storing the information used to determine the classification codes. A wafer is selected from a production lot after the lot is sent through a first manufacturing process. The selected wafer is scanned to determine if there are defects on the wafer. Images of selected defects are examined and a numerical value is assigned to each of N elemental descriptor terms describing each defect. A classification code is determined for each defect based upon the numerical values assigned to the N elemental descriptor terms. The classification code and numerical values assigned to the N elemental descriptor terms are stored in a database. The wafer is sent through each sequential process and classification codes are assigned to additional defects selected after each sequential process. The classification codes and numerical values assigned to the N elemental descriptor terms for the additional selected defects are stored in the database.

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patent: 5539752 (1996-07-01), Berezin et al.
patent: 5541846 (1996-07-01), Secrest
patent: 5649169 (1997-07-01), Berezin et al.

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