Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1990-09-14
1992-04-28
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310312, 310323, 310329, 73517R, 73517AV, H01L 4108
Patent
active
051091755
ABSTRACT:
A monolithic resonator structure for a vibrating beam force sensor, comprising an accelerometer and pressure transducer, is provided which comprises an outer structure including a mounting structure, a force transfer structure, a plurality of flexure beams extending between the mounting and force transfer structures; and an inner structure including a vibrating beam extending between the mounting structure and the force transfer structure. The monolithic resonator is non-planar in that the outer structure has a thickness greater than said inner structure.
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Budd Mark O.
Dougherty Thomas M.
Lucas Schaevitz Inc.
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