Surface analysis method and a device therefor

Details Surface analysis method and a device therefor Surface analysis method and a device therefor

1989-10-20

1991-07-02

Hannaher, Constantine

Radiant energy

Electron energy analysis

250306, G01N 23227

Patent

active

050287788

ABSTRACT:
Surface analysis method capable of obtaining depth profiles of elements and chemical bonds in a nondestructive manner and with high accuracy, which comprises irradiating light to a sample surface to be analyzed with changing its energy, detecting electrons emitted from the surface of the above sample and corresponding to a certain binding energy, and subjecting the resultant detected signal to integration transform; and constitution of a device for carrying out the method.

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